Piezoelectric Al/sub 0.3/Ga/sub 0.7/As longitudinal mode bar resonators

This paper reports the modeling, fabrication, and experimental characterization of piezoelectric longitudinal mode bar resonators based on thin film single crystal Al/sub 0.3/Ga/sub 0.7/ As. Fabricated resonators with lengths ranging from 1000 /spl mu/m to 100 /spl mu/m have been characterized for operation in their first five odd longitudinal modes. Resonance frequencies range from 2.5 to 75 MHz, with quality factors up to 25 390 at 21.8 MHz in vacuum. Power handling capacity as high as -2.6 dBm is demonstrated at 18.8 MHz. Motional resistance and temperature stability of the resonators are also evaluated.