Parallel signal injection in a CCD using an integrated optical channel waveguide array

Parallel signal injection into CCD's by means of an integrated optical channel waveguide array is demonstrated. A device in which 20 channel waveguides are coupled to a 4-phase CCD having two-level polysilicon electrodes is successfully operated. CCD transfer inefficiency is 1.0 × 10
^-4
. Experimental results illustrating array uniformity are presented.