Fabrication of ultrathin and highly flexible InP-based membranes for microoptoelectromechanical systems at 1.55 μm

Tunable microcavities have been fabricated to evaluate their tunability in dependence on the membrane thickness. The membrane thickness has been decreased from 615 nm down to a record thickness of 123 nm yielding in a maximum mechanical tunability of 15.15 nm/V
²
. Furthermore, a three-period /spl lambda//4 InP/air-gap high reflective mirror (R > 99.8% at 1.55 μm) with a record wide stopband of more than 1100 nm has been fabricated. These results are achieved thanks to specific metal-organic vapor-phase epitaxy growth parameters.