I. Introduction
Compared with the conventional two-dimensional (2-D) positioning device with cumbersome stacked arrangements, the 2-D positioning device with a planar motor possesses advantages such as direct driving, low friction, no backlash, high accuracy, and so on. Until now, many types of planar motors have been proposed. However, according to their principles, most of the planar motors can be classified into three types, i.e., variable reluctance planar motor, induction planar motor, and synchronous permanent-magnet planar motor (SPMPM) [1]. Among them, the SPMPM has the advantages of low cost, simple structure, high-power conversion ratio, etc. And it has been attracting more and more attention of the academic field and the engineering field.