A reconfigurable 6-20 GHz RF MEMS impedance tuner

A 6-20 GHz reconfigurable triple-stub impedance tuner has been developed. It is based on a 11-switched MEMS capacitor network producing 2/sup 11/ different impedances. The measured and simulated impedance coverage is the widest ever measured to-date from any RF MEMS tuner. This network is most suitable for noise parameters and load-pull measurements of transistors at 6-20 GHz.