Effects of ceramic thin film coating on friction surfaces for surface acoustic wave linear motor

The effects of ceramic thin film coating on friction surfaces for surface acoustic wave (SAW) linear motor were estimated. By using a slider coated with SiC, the maximum no-load speed of the slider was approximately 1.1 m/s, which was equivalent to the horizontal vibration velocity of the Rayleigh wave at the driving voltage of 125 V/sub 0-p/. Furthermore, by using a slider coated with HA-DLC and a stator coated with Al/sub 2/O/sub 3/, the no-load speed and the output force of the slider were approximately 1.5 m/s and 3 N at 190 V/sub 0-p/. It was shown that the driving characteristics were improved by ceramic thin film coating with the proper materials such as SiC, HA-DLC and Al/sub 2/O/sub 3/ on friction surfaces.