Grain growth of polycrystalline Si thin film for solar cells and its effect on crystal properties

In this study, in order to inquire into the principle of the fabrication of the poly-Si film via the grain growth process, we clarified the grain growth mechanism of the thin film for the solar cell by investigating temporal change of the grain size distribution. Moreover, this process was explained by a theoretical model taking two- and three-dimensional growth modes into account. In addition, the crystal quality was evaluated using Raman spectroscopy. The quality was very high comparing with the film prepared by the laser annealing technique.