Advancement of MEMS into RF-filter applications

RF-MEMS filters will substitute conventional filters in mobile communication under certain technical and commercial conditions. Key performance parameters and requirements are discussed in detail. Two different approaches for RF-MEMS filters are reviewed and compared: Electric field driven MEMS-resonators and piezoelectric MEMS resonators. State-of-the-art RF-MEMS filters based on bulk-acoustic-wave (BAW) resonators are presented.