Frequency temperature characteristics of stepped bi-mesa-shaped AT-cut quartz resonators

To confirm the decoupling effect of stepped bi-mesa structures, we fabricated stepped bi-mesa resonators and measured their frequency-temperature behavior. The results showed that stepped bi-mesa resonators have better temperature characteristics than bi-mesa resonators. These results confirmed that using stepped bi-mesa structures reduces the influence of mesa edges and improves the characteristics of bi-mesa resonators.