Retarding Field Energy Analyzer For Measurement of Ion Energy Distribution In Cold Plasma

Retrading Field Energy Analysers (RFEA) are generally used to measure ion energy distribution in high energy ion beams. In this paper, we present a two-grid RFEA that was designed specifically for measuring distribution of low energy ions in glow discharge. Selectivity of low energy ions was ensured by placing the grids as close as 100 μm and by using a picoammeter for measurement. Simulations were run to identify grid transmittance and dimensions. The actual RFEA was fabricated using 200 μm thick stainless steel grids. The number density, energy distribution of ions, and plasma potential were calculated from the RFEA signal.