Quadrature Error Correction System for Disk Ring Gyroscope Using (100) Single Crystal Silicon

In this paper, a novel quadrature error correction system for a high Q-factor MEMS disk resonator gyroscope (DRG) is proposed. Suppression of quadrature error signals is achieved by applying a voltage to the corresponding sense electrodes by means of negative feedback control. By correcting the quadrature error force, the system improves the nonlinearity and the sensitivity. The output voltage in the detection mode is reduced by 50 times and the nonlinearity is reduced by 89.6%. Compared with previous researches, the proposed method can decrease the numbers of the tuning electrodes and avoid the usage of a large DC bias voltage.