An eight-mass MEMS gyro with area-variable comb capacitance

It is a critical way of achieving high performance through enhancing Coriolis mass and driving amplitude of MEMS gyroscopes. The paper proposes a Type II Coriolis Vibratory Gyro with an eight-mass structure, featuring linear driving and a detection comb capacitance, facilitating significant displacement. The structure, a fully symmetric configuration operating in the 2θ mode like the disk gyroscope, supports angular rate readout or angular rate integration working method. Operation under mode match, the gyroscope exhibits a notably high mechanical gain. The paper encompasses the design of the structure, which was subsequently fabricated using MEMS processes. Within a range exceeding 100°/s, the gyroscope demonstrates angular rate resolution superior to 0.1°/s. The gyroscope exhibits characteristics of low noise, as evidenced by an angular random walk of 0.26°/√h and a bias instability of 1.5°/h.