Silicon-based MEMS Inertial Device Stability Analysis

In response to the structural and dimensional characteristics of micro springs, which are prone to instability and buckling during operation, resulting in the failure of MEMS S&A devices, a stability analysis has been conducted around the micro-springs of silicon-based MEMS fuse inertial devices. The anti-buckling ability of the inertial device was analyzed theoretically, taking into account the number of springs and the method of connection. Six research schemes were developed based on a basic research model. The inertial device was subjected to a buckling mode analysis. In the study, four springs inertial devices (scheme 1 and 2) outperform two springs (scheme 3, 4, 5, and 6) inertial devices in anti-buckling performance, and inertial devices containing compression and tension springs (scheme 2 and 3) outperform those containing only compression springs in anti-buckling performance (scheme 1 and 4). In accordance with a comprehensive analysis, the inertial device with the combination of two tension springs above and two compression springs below (scheme 3) has a strong anti-buckling capability and a larger critical instability force, which is more stable than other schemes.