Short-term and long-term T-O phase transition responsible for two stages of wake-up process in ferroelectric Hf0.5Zr0.5O2 film

We design and carry out an in-situ grazing incidence X-ray diffraction (GIXRD) investigation in the phase transition behaviors during wake-up of the ferroelectric Hf
0.5
Zr
0.5
O
2
(HZO) films. Based on results, we demonstrate that short-term and long-term tetragonal (T)-orthorhombic (O) phase transitions are responsible for two stages of wake-up processes for polarization obtaining and increase in HZO, respectively.