Microwave Cutoff Probe Diagnostics and Beyond

In the last two decades, numerous previous studies have indicated that the measurement results of microwave probes are quite precise and accurate. These results can be further improved by applying various techniques such as sheath width adjustment, circuit and transmission line modeling, and altering the probe’s shape (e.g., ring or planar). Recently, there have been significant advancements in cutoff probe technology. Researchers have explored methods beyond the traditional cutoff phenomenon of plasma, including plasma-vacuum impedance matching and surface wave resonance. This presentation will introduce the latest progress in cutoff probe research, highlighting advancements beyond the traditional understanding of the cutoff phenomenon.