W Band GSG Probes Fabricated by DRIE Manufacturing

This paper presents a new type of waveguide GSG probe. This paper presents a
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band (75-110GHz) GSG waveguide probe, which has a ground on the back. This is to ensure that the designed probe is in full contact with the ground. The designed probe consists of a GSG tip, a CPW-to-microstrip transition and a microstrip-to-waveguide transiton in this structure. The waveguide port of the microstrip-to-waveguide transiton in the designed probe is inserted into a standard rectangular waveguide and then directly connected with the vector network analyzer (VNA). The probe suitable for the DRIE micromachining technology are designed on a 50um silicon substrate that does not need to be assembled, which will greatly reduce the time and cost of processing. This design idea has a great potential for more high frequency and more economical.