An Efficient Probe Calibration and Compensation Method With ADMM and Regularization Constraint for Near-Field Scanning

Near-field probes have been widely used in the measurement of radio frequency circuits and integrated circuits. It is an important process to correct the output distribution of the probe to the field distribution. However, near-field probes generally have certain receiving characteristics, which determine their performance. Therefore, it is very important to calibrate the receiving characteristics of near-field probes. In this article, we present an efficient probe calibration and probe compensation technique for electromagnetic near-field scanning. In the probe calibration process, the alternating direction method of multipliers is applied to flexibly solve the deconvolution problem, which facilitates reducing computational complexity in the spectral domain and elastic-net regularization in the spatial domain. For the probe compensation process, the second-order derivative constraint is introduced to improve the antinoise ability and the smoothness of the reconstructed results. Numerical examples and laboratory experiments show the effectiveness of the proposed method.