Mode-Matched Disk Resonator Gyroscope in (100) Single Crystal Silicon with Shock Resistance

This paper proposes a novel disk resonator gyroscope (DRG) fabricated in the (100) single crystal silicon (SCS) wafer. The structure consists of an outer anchor, concentric rings, connecting spokes and inner electrodes. It operates in the N=2 wineglass mode, and the translation mode (N=1) has a higher resonant frequency, which reduces the effects of harsh shock environments and maximizes sensitivity. Mode order is achieved by adjusting the inner ring radius and the initial frequency split of the N=2 wineglass mode is reduced by adjusting the spoke angle. The prototype device was fabricated based on Silicon on Insulator (SOI) process. The experimental results of the prototype device validate the proposed novel DRG structure.