Application of Discrete Sliding Mode Control in Solar Wafer Air Suspension System

The wafer air suspension system is a typical nonlinear control system with uncertainty and unknown external interference, so this paper uses discrete sliding mode variable structure control to study the wafer-position tracking problem in this system. In this paper, the dynamic model of the wafer suspension system is analyzed first, and the discrete model is established which is conducive to the controller design. Then, the discrete sliding mode controller is designed in the case of interference and jitter by combining the control system with the discrete sliding mode control theory. The simulation results show that compared with the traditional exponential reaching law method, the saturation function reaching law method is more effective in eliminating chattering, tracking reference signals and anti-disturbance suppression.