A Compact 94-GHz 6-bit Active Phase Shifter with 2.81deg/0.47dB RMS Phase/Gain Error

This paper presents a 94-GHz 6-bit active phase shifter (PS) which consists of a compact orthogonal signal generator, a digital-to-analog converter (DAC), and two-stage amplifiers. A series peaking inductor is employed between the amplifier and the DAC to increase gain and bandwidth. The post-layout simulation results show that the proposed PS achieves a 3dB bandwidth of 10 GHz. The simulated root-mean-square (RMS) phase error is 2.09°—2.91° and the RMS gain error is 0.47—0.53 dB within the 3-dB bandwidth. The core area of the PS is $443 \times 297 \mathrm{um}^{2}$.