A D-Band Patch Array Antenna Using 180 nm CMOS Process

This article presents a 77 GHz series-fed patch antenna array with bandwidth and gain. The proposed chip antenna utilizes the TSMC 180 nm CMOS process. The antenna structure consists of Metal 6 as the top layer and Metal 1 as the bottom layer. The measured bandwidth ranges from 16.4 GHz to 105 GHz. The result closely matches the simulated frequency of 57 GHz to 88 GHz. The antenna gain of -2.5 dBi at 70 GHz. According to the measurement data, the antenna frequency range proposed in this paper can be applied in W-band automotive radar and industrial applications.