Research and Optimization of Large Aperture Electromagnetic Mems Mircomirror for Automotive Lidar

We report 2D electromagnetic MEMS micromirrors passing the AEC-Q100 standard with large apertures ranging from 5mm to 10mm. To meet the shock and vibration requirements, stopper structures are designed in the horizontal and vertical directions of the micromirror. The vertical upper and lower stopper structures are made of silicon and integrated with the micromirror by glue. The packaged micromirror passed 1500g shock and 50g vibration tests, this is the first time a micromirror with such large aperture has passed AEC-Q100 vehicle-level shock and vibration tests. For all the mirrors the optical scanning angle is larger than 30 x 30 degrees and also integrate piezoresistive sensors and temperature sensors for closed loop angle feedback. Based on the 10mm micromirror, our Lidar prototype finally achieved 180m ranging with 90% detection probability at 10% object reflectivity.