High Performance MEMS Magnetometer for Industrial Applications

This paper presents a high-performance z-axis Lorentz-force magnetometer based on an in-plane micro-resonator composed of flexural micro-beams connected to a T-shaped structure. The concept is based on tracking the amplitude change (AM) of the first out of plane mode under different magnetic field strengths. Powered at 72 mW, the device demonstrated a measured high sensitivity (S) of 17.19 μm/T that is comparable to the reported magnetometers. Additionally, we demonstrated that operating at AC voltage of 5 V, the power consumption can be reduced by half. These features, combined with, simplicity of fabrication, and low-cost, make the proposed device promising to develop a magnetometer network system for industrial applications.