A Near-Field Super-Resolution THz Sensor Utilizing Micro-Coaxial Processing

This paper presents a super-resolution near-field sensing probe designed by micro-coaxial. Utilizing waveguide micro-coaxial to confine terahertz (THz) waves within transmission lines and guide them to the tip of a probe, which can effectively enhance the dynamic range and reduce transmission losses in free space. It is designed for easy integration, with probe dimensions of
$\mathbf{0.9}\ \mathbf{mm}\times \mathbf{0.9}\ \mathbf{mm}\times \mathbf{5.4}\ \mathbf{mm}$
. The sensor designed operates at 90 GHz realizing spatial resolution of
$\mathbf{20}\ \boldsymbol{\mu} \mathbf{m}$
, about 1/165 of a wavelength. This sensor can achieve
$\mathbf{100}\ \boldsymbol{\mu} \mathbf{m}$
response distance and 16 dB dynamic range, respectively. Micro-coaxial probes utilize copper as the metal conductor and air as the dielectric materials of transmission.