Micro Electric Field Sensor Based on Piezoelectric and Piezoresistive Coupling

Electric field information is a fundamental physical quantity in power systems, and electric field measurement is indispensable for the structural design and insulation testing of electrical equipment, so electric field measurement is a very important task. In this paper, we propose a miniature electric field sensor structure based on the piezoelectric-piezoresistive effect and the interface coupling mechanism between them. The piezoelectric effect converts the electric field into a deformation of the piezoelectric crystal, which drives the vibration of the semiconductor piezoresistive film through the interface coupling between the materials, thus causing the resistance of the doped region of the piezoresistive film to change, and the external electric field can be inferred by measuring the change in resistance using a Wheatstone bridge. To verify the feasibility of this electric field sensor, a simulation was performed by using COMSOL Multiphysics, and we also designed the manufacturing process of the device. The simulation results show that the electric field sensor has a good electric field response and is expected to be applied to electric field measurement on a large scale in the future.