BOE-ziSIM: A Design-Technology-Manufacturing Co-optimization Platform

Thin-film transistors (TFT) and organic light-emitting diodes (OLED) for display applications involve new materials, structures and processes in the design and development phase, and these elements can have a significant impact on the performance of the TFT devices. The increasing need for personalized and diversified display productions brings two problems: 1. To achieve the desired performance indicators in fabrication processes, a large number of experiments are required to continuously optimize the process parameters, which not only increases economic and time costs but also limits the development speed of new productions. 2. The display production iterations are getting faster to meet the market requirement, in other words, the time left for yield improvement becomes shorter. A Design-Technology-Manufacturing Co-optimization platform called BOE-ziSIM is introduced in this paper, it was developed to solve the above mentioned problems, the experiment results show that the defects analysis time is reduced from hours to minutes, and the equipment adjustment time is reduced from days to minutes.