Analysis of Silicon Nitride Trampoline Resonators for Ultrasensitive Infrared Detection

We theoretically assess the ability of ultrathin silicon nitride (SiN) trampoline nanomechanical resonators for ultrasensitive infrared light detection. Our findings indicate an order of magnitude improvement in normalized responsivity, achieving a level of 10
⁶
/W. Absorptance optimization via patterned metamaterials could further enhance the resonance shift by two orders of magnitude.