Synthesis of Thin Film Structures of Zirconium Oxide by Spray Pyrolysis

With the development of technology, protective coatings in nano and microelectronics are actively developed. Protective coatings based on metal oxides, such as aluminum oxide, titanium oxide, iron oxide, as well as ceramic protective coatings, have been actively developed. Particular attention is paid to zirconium oxide. The article presents a technological installation for obtaining coatings from metal oxides by spray pyrolysis. The installation is part of the information-measuring and control system for the synthesis of metal oxide coatings and its technological subsystem. With the help of this installation, coatings samples of zirconium dioxide with an admixture of yttrium, introduced for the purpose of stabilization, were obtained. The study results of the coating structure morphology, the features of the solution influence on the coating structure, as well as the graph model and its analytical description, used to analyze the relationship between the parameters of the technological process, electrophysical and optical parameters of metal oxide coatings, are presented.