Manufacturing Technology of Ultra-hard Master Mold with Electro-discharge and Mechanical Machining System for Nano-devices

Recent high-tech industries, such as display, semiconductor, bio-reactor and so on, requires ultra-fine feature size of devices. From the view of manufacturing process, using master mold and forming is the most economical and productive way to mass production, however it is not easy because of limitation of conventional machining techniques such as mechanical machining and laser machining. In this research, electrodischage and mechanical hybrid machining system is used to fabricate ultrafine structure on ultrahard master mold with feature size below 20 μm. Machining signals; force, acceleration and acoustic emission are collected and analyze to enhance fabrication precisions.