CMOS MEMS Resonator for Physical Reservoir Computing

This paper presents a CMOS-MEMS clamped-clamped (CC) beam for physical reservoir computing. The device is designed and fabricated in the CMOS back-end-of-line (BEOL) metal and oxide layers. The resonant beam is electrostatically actuated to operate in the nonlinear states for delay-based physical reservoir computing. The closed-loop reservoir computing is realized by the nonlinear CC beam, a field programmable gate array (FPGA) controller, and a lock-in amplifier. The fabricated and post-processed CMOS MEMS device were characterized. Preliminary parity benchmark tests in different test conditions are presented.