High-Accuracy Dry-Bulb Temperature Sensing with Short-Time Fourier Transform (STFT) Using PSON pMUTs

This paper presents the methodology for estimating the temperature in moist air, known as dry-bulb temperature, using Piezoelectric over Silicon-On-Nothing (PSON) ScAlN pMUTs based on Short-Time Fourier Transform (STFT). A digital signal processing technique is proposed for the Time-of-Flight (ToF) estimation based on STFT with the estimated ToF value used to compute the ultrasonic speed of sound. Experimental results presented here report a mean accuracy of 95% in the estimated dry-bulb temperature. This is a very positive outcome towards the usage of the proposed signal processing algorithm along with standard PSON pMUTs for sensing temperature in a moist environment.