System Level Simulation of MEMS Pressure Sensor

The article deals with designing the system model of MEMS pressure sensor for the chosen technical requirements. MEMS pressure sensor consists of a micromechanical capacitive sensitive element and a programmable application specific integrated circuit. The synthesis technique of the pressure sensor system model has been developed. The method is based on an analytical parameter estimation and preliminary schematic simulation and suitable for top-down design methodology. The obtained results allowed to select the pressure sensor design and to develop the technical requirements for pressure sensor components: a sensing element and an integrated circuit. System level simulation of MEMS pressure sensor was made and SINAD performance of 67.8 dB was obtained.