Vertical Power Delivery and Heterogeneous Integration for High-Performance Computing

This paper presents a heterogeneously integrated vertical power delivery (power tree) system that combines a 180nm HV BCD 20V:4V hybrid converter, a 65nm 4V:1V switched-capacitor converter, and an interposer filled with
$3\mathrm{D}$
nano-porus deep-trench flying and decoupling capacitors. A prototype of the overall system achieves a total efficiency of 87% from 20V to 0.9V, all while featuring high-voltage vertical delivery that minimizes lateral conduction losses and the total number of pins required for power/ground.