Impact of Partial Thinning of SiO2 on Spurious Modes in TC-SAW Resonators

Lithium niobate substrates using overcoat layer of oxide for temperature compensation exhibit a strong affinity toward multimode behavior. Piston mode, which is common technique to suppress the transverse modes, can’t suppress the spurious resonance caused by the SH type Love mode even after the Lithium niobate rotation angle is optimized. This paper investigates the Love mode spurious resonances theoretically for their suppression without sacrificing the other characteristics. (Abstract)