Influence of Orientation Angle of IDT Electrode on Third-Order Harmonics of SAW Devices

In this paper, influences of electrode orientation angle on the third-order harmonics of SAW devices are investigated and discussed. Several one-port SAW resonators with different substrate cut angles, electrode crystallinity, and orientation angles of IDT electrode are fabricated, and their third-order harmonic responses including phase characteristics are evaluated. As a result, significant influences of electrode orientation angle on the amplitude and phase of the third-order harmonics are confirmed.