Suppression of Noise in SEM Images Using Adaptive Anisotropic Partial Differential Equations*

This paper proposes a denoising method based on the adaptive anisotropic partial differential equations (AAPDE) for SEM images. The proposed method adaptively selects the denoising parameters of different regions based on the gradient amplitude of SEM images, which effectively solves the problem of global parameters not being applicable to local regions of the image. Experimental results show that the proposed method has a better denoising effect than the global denoising methods.