Complementary Clamp-Based Multi-Degree-of-Freedom Parallel Inchworm Actuator

In the design of multi-degree-of-freedom inchworm actuators, multiple single-degree-of-freedom are often used for series connection, which causes many problems. This paper introduces a new XY parallel inchworm drive. The motion mode of “Clamp-Drive-Clamp” is adopted in a single direction, enabling motion control in two directions using only three piezoelectric ceramics (PZT). Numerical simulations based on finite element simulation (FEA) demonstrate feasibility and verify performance. The results show that the actuator is capable of carrying a lateral load of 10 N, with a maximum step size of 16 um in the XY direction and good dual-axis motion consistency.