Development of a long-cycle data acquisition system based on silicon resonant pressure sensors

Long-term stability is one of the key performance for high-precision pressure sensors. The aim of this paper is to design a long-cycle test data acquisition system for the silicon resonant pressure sensors to analysis the reasons that affect long-term stability. By analyzing the working principle of the sensor, a high-precision synchronous acquisition of two frequencies is achieved, and a polynomial surface fitting algorithm is used for adaptive compensation of temperature and pressure, and a logic switching chip is used for multi-channel networking. An automatic test platform is setup subsequently, which is based on the C/S architecture developed in C# and uses four listening threads to store the collected data into SQLite and SQL SERVER respectively ensuring lightweight and reliable data storage. By comparing the test data with standard frequency meters and pressure controllers, a high accuracy acquisition of silicon resonant pressure sensors with accuracy of 0.02% FS is achieved, which meets the demand for long-cycle testing of resonant pressure sensors.