High integration tunable capacitors on chip based on RAM technology

Compared with other on-chip passive device tunable technologies so far, this paper proposes a continuously tunable on-chip microwave passive element technology based on Reverse-Assembled-Membrane (RAM) technology for the first time, which is controlled by voltage. This tunable capacitor has an extremely short corresponding time and wide tuning range, and the capacitance can change thousands of times. Besides, the tunable capacitor with ultra-high sensitivity can be obtained by changing the size and structure of the interdigital capacitor. Furthermore, the RAM technology can be used to develop tunable inductors and transformers. And the micron scale of tunable capacitor actuator has a very potential application in Micro-Electro-Mechanical System.