Research on Quadrature Suppression Method of Large Stiffness MEMS Disk Resonator Gyroscope Based on Axial Reconfiguration

MEMS disk resonator gyroscope has become a hot research topic nowadays because of its excellent performance and processing advantages. This paper takes the large stiffness MEMS disk resonator gyroscope as the research object, and firstly establishes the dynamic equations in ideal and non-ideal states, studies the quadrature error mechanism of MEMS disk gyroscope, and analyzes the causes of serious quadrature coupling of large stiffness MEMS disk resonator gyroscope based on it; then a large stiffness MEMS disk resonator gyroscope quadrature suppression method based on axial reconfiguration is proposed for this problem. The method is based on the experimental calculation of the deflection angle of each stiffness axis of the gyroscope, pre-selection of the drive and sense axis with small quadrature coupling error, and the quadrature suppression of the large stiffness disk resonator gyroscope by means of electrostatic coupling stiffness correction; finally, the closed-loop control scheme of the large stiffness disk resonator gyroscope is proposed based on the method, including the closed-loop control of drive mode, quadrature error closed-loop suppression, and force rebalance detection control. Experiments show that the closed-loop control method based on axial reconstruction can effectively reduce the output bias of the gyroscope and improve the bias instability performance of the gyroscope, and its bias instability improves from 104.3°/h to 3.2°/h compared with the gyroscope under open-loop quadrature, open-loop detection, which verifies the effectiveness of the method on the performance improvement of large-stiffness MEMS disk resonator gyroscope.