Modeling of ferroelectric micro-cantilever actuator

This paper proposes a simple modeling and characterizing ferroelectric micro-cantilever beam. The key ingredient of the proposed method is the incorporation of phenomenological hysteresis model into the voltage-induced bending moment of the Euler-Bernoulli beam model. Furthermore, by combining the predicted hysteresis displacement with measurement data, ferroelectric parameters including remanent and saturated polarization, coercive electric field as well as piezoelectric coefficient e
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can be determined simultaneously. The proposed model and characterization approach can be useful for micro-actuator design.