MEMS Using Epitaxial PZT Family

This paper summarizes the sputter deposition of epitaxial PZT family including PZT, PMnN-PZT, and Sm-doped PMN-PT and the development of pMUTs (piezoelectric micromachined transducers) using epitaxial PZT family films. The deposition method, the choice of buffer layers, and the results of characterization are briefly reported. Using epitaxial PZT, epitaxial PMnN-PZT, fibered epitaxial PZT and heterogeneously stacked piezoelectric films, various designs of pMUTs were fabricated and tested. The problem and challenges to address toward practical applications are also presented.