Target Transfer of Ferroelectric Thin Films for Electro-Optic Modulation on SOI Platform

Electro-optical modulators play an essential role in high-capacity fiber optic transmission systems and high-speed optoelectronic information processing systems. In this work, we demonstrate target transfer of ferroelectric thin films for electro-optic modulation on SOI platform. Our BTO hybrid integrated MZI modulator has exhibited a $V_\pi L$ as low as 1.67 $\text{V}\bullet \text{cm}$, and the PTO hybrid integrated micro-ring modulator exhibits an effective electro-optical coefficient $r_{eff}$ as 6 pm/V, which open up new possibilities and approaches for implementing compact electro-optical modulators.