A Novel MEMS Double-Layer Spiral Inductor with High Current-Carrying Capacity

MEMS spiral inductors have a widely potential application in thin-film electronics and consumer electronics due to their advantages of miniaturization, very thin, low loss and excellent uniformity. However, the existing MEMS inductors have a huge challenge of low current-carrying capacity, which limits their applications. In this paper, a novel high current-carrying micro-inductor based on MEMS spiral coils is proposed, and is analyzed by finite element method (FEM). The simulation results demonstrated that compared with the traditional SL (single-layer spiral inductor) under the same coil size, the maximum current of the DL-P (double-layer spiral inductor with parallel connection) can be improved with 27.53% (DC) and 21.61% (AC at 1GHz) respectively. This finding is useful for the design of micro inductors with high current-carrying capacity in theory.