Realization of Different Anisotropy Direction for Each Thin-film Magnetoimpedance Element on the Same Substrate

We have attempted to provide different anisotropy locally on the same substrate, i.e., different directions of easy axis in each area by combining simple Joule heating and the application of a magnetic field with permanent magnets. Orthogonal thin-film magnetoimpedance elements were fabricated on the same substrate, and the easy axis was successfully induced parallel to the width direction of each element, respectively. Each element shows the double-peak impedance profiles which is important to obtain higher sensitive magnetic field sensor. The results contribute to realizing multifunctional thin-film magnetic devices on substrates.