Electrical variable capacitor for RF plasma systems with a short capacitance variable time

In this paper, a new electrical variable capacitor (EVC) circuit is proposed to achieve short capacitance variable time. The limitations of the conventional EVC circuits are solved by switching the position of the PiN diode and the capacitor and by adding a shunt inductor. The proposed EVC circuit can achieve a short capacitance variable time with a smaller filter inductor by reducing RF voltage stress on the filter inductor.