Nanorobotics and Automatic On-Wafer Probe Station with Nanometer Positionning Accuracy

Precise and repeatable radiofrequency (RF) measurements call for innovative characterization techniques. In particular, the use of nanorobotics for on-wafer measurements is a viable solution to address RF characterization with enhanced alignment accuracy. In this work, we present the development of a nanorobotics and automatic on-wafer probing station designed and realized for GSG on-wafer millimetre-wave measurements.