Selected Metal Oxides Thin Films for Gas-Sensing Application in The Microwave Frequency Range

In this paper, the investigation results on selected metal oxide thin films for gas-sensing applications in the microwave frequency range are presented. The developed microwave gas sensors were tested under exposure to the selected volatile organic compounds such as acetone, ethanol, and methanol at room temperature and 50% relative humidity. The microwave coupled-line section was used as an electrode for gas-sensing behavior measurements with the microwave five-port reflectometer.