A MEMS-Based Electrochemical Angular Accelerometer Based on Planar Electrodes With Micropillar Array Structure

MEMS-based electrochemical angular accelerometers based on planar electrodes with micropillar array structure were reported in this article, which converted external angular acceleration into an electrical signal based on the liquid inertial mass and the varied concentrations of reactive ions. Theoretical analysis and numerical simulations of the angular accelerometer were carried out, where the key structures of the planar electrode were optimized. Based on microfabrication, electrochemical angular accelerometers based on planar electrodes with micropillar array structure were fabricated and characterized, and the test results were consistent with the numerical simulation. When the area of the electrodes was increased by a factor of 1.67, the sensitivity level of the devices based on planar electrodes with micropillar array structure was about 1.60–1.78 times higher in the frequency range of 0.83–10 Hz than that of the devices without micropillar array, and the sensitivity level at 10 Hz was improved by more than 70%, which is essential for expanding the bandwidth and controlling the noise level of electrochemical angular accelerometers. In summary, the MEMS-based electrochemical angular accelerometers reported in this article can provide a new perspective for performance optimization based on integrated planar electrodes, demonstrating the potential of MEMS-based electrochemical angular accelerometers for applications in seismology.