Position Control of X-Y Precision Planar Motion Stage Based on Iterative Learning and Cross-coupling

In some precision machining applications, not only should we pay attention to the tracking accuracy of the X-Y precision plane motion table, but the more important criterion is the contour accuracy. This paper proposes an adaptive iterative learning control that adjusts in real time with the system's working state for the X-Y precision plane motion stage control system. Then on the basis of adaptive iterative learning control, the relationship between the two axes is established by cross-coupling control, the contour error of the system is calculated in real time, and the stability of the system is improved. The final experimental results show that the improved algorithm has smaller contour error and better robustness.